[PC-3-5] Direct Formation of Selective CVD-Al Contact Plug on Titanium Silicide Obtained by Silicidation of Titanium Including Nitrogen

Takayuki KOMIYA、Youichi TAKAI、Hiroshi SHINRIKI (1.Technology Development Center, LSI Division, Kawasaki Steel Corp.)

https://doi.org/10.7567/SSDM.1995.PC-3-5