[PC-3-9] Electrochemical Analyses for Corrosion Mechanism of Al-Cu Alloy Thin-Films

Nobuo Aoi, Akemi Kawaguchi, Shuichi Mayumi, Kousaku Yano (1.Semiconductor Research Center, Matsushita Electric Industrial Co. Ltd., 2.Matsushita Electronics Corporation, Kyoto Research Laboratory)

https://doi.org/10.7567/SSDM.1995.PC-3-9