The Japan Society of Applied Physics

[PC-5-2] Leakage Current Conduction Mechanism of Liquid Phase Deposited (LPD)SiO2 Film

Tso-Hung Fan, Shyue-Shyh Lin, Ching-Fa Yeh (1.Department of Electronics Engineering & Institute of Electronics, National Chiao-Tung University)

https://doi.org/10.7567/SSDM.1995.PC-5-2