[PC-5-7] The Origin of Micro-Loading Effect of TEOS-O3 Oxide II

U-In Chung, Myoung-Beom Lee, In-Seon Park, Sang-In Lee, Moon-Yong Lee (1.Semiconductor R&D Center, Samsung Electronics Co.)

https://doi.org/10.7567/SSDM.1995.PC-5-7