[PC-5-7] The Origin of Micro-Loading Effect of TEOS-O3 Oxide II

U-In Chung、Myoung-Beom Lee、In-Seon Park、Sang-In Lee、Moon-Yong Lee (1.Semiconductor R&D Center, Samsung Electronics Co.)

https://doi.org/10.7567/SSDM.1995.PC-5-7