[PC-6-3] Surface Observation and Modification of Si Substrate in Solutions

Atsushi ANDO、Kazushi MIKI、Kazuhiko MATSUMOTO、Tetsuo SHIMIZU、Yukinori MORITA、Hiroshi TOKUMOTO (1.Electrotechnical Laboratory (ETL)、2.National Institute for Advanced Interdisciplinary Research (NAIR))

https://doi.org/10.7567/SSDM.1995.PC-6-3