[PC-6-3] Surface Observation and Modification of Si Substrate in Solutions

Atsushi ANDO, Kazushi MIKI, Kazuhiko MATSUMOTO, Tetsuo SHIMIZU, Yukinori MORITA, Hiroshi TOKUMOTO (1.Electrotechnical Laboratory (ETL), 2.National Institute for Advanced Interdisciplinary Research (NAIR))

https://doi.org/10.7567/SSDM.1995.PC-6-3