Oxidation Processes on H-Terminated Si(100) Surfaces Studied by High-Resolution Electron Energy Loss Spectroscopy

Hiroya IKEDA; Khoji HOTTA; Shinya FURUTA; Shigeaki ZAIMA; Yukio YASUDA

doi:https://doi.org/10.7567/SSDM.1995.PC-6-4

[PC-6-4] Oxidation Processes on H-Terminated Si(100) Surfaces Studied by High-Resolution Electron Energy Loss Spectroscopy

Hiroya IKEDA, Khoji HOTTA, Shinya FURUTA, Shigeaki ZAIMA, Yukio YASUDA (1.Department of Crystalline Materials Science, School of Engineering, Nagoya University)

https://doi.org/10.7567/SSDM.1995.PC-6-4

1995 International Conference on Solid State Devices and Materials

[PC-6-4] Oxidation Processes on H-Terminated Si(100) Surfaces Studied by High-Resolution Electron Energy Loss Spectroscopy