[PC-7-1] Characterization of Surface Potential of Si-SiO2 Interface by Photoreflectance Spectroscopy

Akira Fujimoto Takaaki Imai, Masanori Okuyama, Yoshihiro Hamakawa (1.Department of Electrical Engineering, Wakayama National College of Technology, 2.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1995.PC-7-1