[PC-7-1] Characterization of Surface Potential of Si-SiO2 Interface by Photoreflectance Spectroscopy

Akira Fujimoto Takaaki Imai、Masanori Okuyama、Yoshihiro Hamakawa (1.Department of Electrical Engineering, Wakayama National College of Technology、2.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1995.PC-7-1