Modeling and Analysis of RF Plasma Using Electrical Equivalent Circuit

Kazuhide INO; Tadahiro OHMI

doi:https://doi.org/10.7567/SSDM.1995.PC-7-5

[PC-7-5] Modeling and Analysis of RF Plasma Using Electrical Equivalent Circuit

Kazuhide INO, Tadahiro OHMI (1.Department of Electronic Engineering, Faculty of Engineering, Tohoku University, 2.Laboratory for Electronic Intelligent Systems, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1995.PC-7-5

1995 International Conference on Solid State Devices and Materials

[PC-7-5] Modeling and Analysis of RF Plasma Using Electrical Equivalent Circuit