[PC-8-3] Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin Film Transistors

Jung-In Han, Jung-Yeal Lee, Deuk-Sung Choi, Choong-Ki Kim, Chul-Hi Han (1.Center for Electro-Optics Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, 2.Semiconductor R/D Lab. of Hyundai Electronics Industries Co., Ltd.)

https://doi.org/10.7567/SSDM.1995.PC-8-3