[PC-8-3] Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin Film Transistors

Jung-In Han、Jung-Yeal Lee、Deuk-Sung Choi、Choong-Ki Kim、Chul-Hi Han (1.Center for Electro-Optics Department of Electrical Engineering, Korea Advanced Institute of Science and Technology、2.Semiconductor R/D Lab. of Hyundai Electronics Industries Co., Ltd.)

https://doi.org/10.7567/SSDM.1995.PC-8-3