[PC-8-5] Hydrogenation of Polysilicon Thin Film Transistors Using Inductively Coupled Plasma

Sung-Hoi Hur, Kang-Sik Choi, Choong-Ki Kim, Chul-Hi Han (1.Center for Electro-Optics Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, 2.Samsung Electronics Co. Ltd., 3.LG Semicon Co. Ltd.)

https://doi.org/10.7567/SSDM.1995.PC-8-5