The Japan Society of Applied Physics

[PD-3-13] Nitrogen Ion Implantation and Thermal Annealing in SiC Single Crystal

Takeshi MIYAJIMA、Norihito TOKURA、Atsuo FUKUMOTO、Hidemitsu HAYASHI、Kunihiko HARA (1.Research Laboratories, Nippondenso Co., Ltd.、2.Toyota Central Research & Development Laboratories, Inc.)

https://doi.org/10.7567/SSDM.1995.PD-3-13