The Japan Society of Applied Physics

[PD-4-3] Nanometer-Sized Silicon Crystallites Prepared by Excimer Laser Ablation in Constant Pressure Inert Gas Ambient

Takehito YOSHIDA, Yuka YAMADA, Takaaki ORII, Shigeru TAKEYAMA (1.Matsushita Research Institute Tokyo, Inc., 2.Institute of Applied Physics, University of Tsukuba)

https://doi.org/10.7567/SSDM.1995.PD-4-3