Nanometer-Sized Silicon Crystallites Prepared by Excimer Laser Ablation in Constant Pressure Inert Gas Ambient

Takehito YOSHIDA; Yuka YAMADA; Takaaki ORII; Shigeru TAKEYAMA

doi:https://doi.org/10.7567/SSDM.1995.PD-4-3

[PD-4-3] Nanometer-Sized Silicon Crystallites Prepared by Excimer Laser Ablation in Constant Pressure Inert Gas Ambient

Takehito YOSHIDA、Yuka YAMADA、Takaaki ORII、Shigeru TAKEYAMA (1.Matsushita Research Institute Tokyo, Inc.、2.Institute of Applied Physics, University of Tsukuba)

https://doi.org/10.7567/SSDM.1995.PD-4-3

1995 International Conference on Solid State Devices and Materials

[PD-4-3] Nanometer-Sized Silicon Crystallites Prepared by Excimer Laser Ablation in Constant Pressure Inert Gas Ambient