[S-I-2-3] A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams

Makoto AKIZUKI, Jiro MATSUO, Satoru OGASAWARA, Mitsuaki HARADA, Atsumasa DOI, Isao YAMADA (1.Microelectronics Research Center, SANYO Electric Co., Ltd., 2.Ion Beam Engineering Experimental Laboratory, Kyoto University)

https://doi.org/10.7567/SSDM.1995.S-I-2-3