[S-I-2-5] Clarification of Nitridation Effect on Oxidation Methods

T. Kuroi, S. Shirahata, Y. Okumura, S. Shimizu, A. Teramoto, M. Anma, M. Inuishi, T. Hirao (1.ULSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1995.S-I-2-5