[S-I-2-5] Clarification of Nitridation Effect on Oxidation Methods

T. Kuroi、S. Shirahata、Y. Okumura、S. Shimizu、A. Teramoto、M. Anma、M. Inuishi、T. Hirao (1.ULSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1995.S-I-2-5