Low Permittivity Organic Dielectrics for Multilevel Interconnection in High Speed ULSIs

Yoshio HOMMA; Takeshi FURUSAWA; Kikuo KUSUKAWA; Shigeo MORIYAMA Hiroyuki MORISHIMA; Hidetada SATO

doi:https://doi.org/10.7567/SSDM.1995.S-I-5-1

[S-I-5-1] Low Permittivity Organic Dielectrics for Multilevel Interconnection in High Speed ULSIs

Yoshio HOMMA, Takeshi FURUSAWA, Kikuo KUSUKAWA, Shigeo MORIYAMA Hiroyuki MORISHIMA, Hidetada SATO (1.Central Research Laboratory, Hitachi Ltd., 2.Hitachi Chemical Co. Ltd.)

https://doi.org/10.7567/SSDM.1995.S-I-5-1

1995 International Conference on Solid State Devices and Materials

[S-I-5-1] Low Permittivity Organic Dielectrics for Multilevel Interconnection in High Speed ULSIs