[S-I-6-4] Low Dielectric Constant Films for ULSI Interconnect Applications

Chien Chiang, Chuanbin Pan, Anne. S. Mack, Yui-lin Ling, Quat Vu, David B. Fraser (1.Intel Corp., Components Research)

https://doi.org/10.7567/SSDM.1995.S-I-6-4