[S-I-6-4] Low Dielectric Constant Films for ULSI Interconnect Applications Chien Chiang、Chuanbin Pan、Anne. S. Mack、Yui-lin Ling、Quat Vu、David B. Fraser (1.Intel Corp., Components Research) https://doi.org/10.7567/SSDM.1995.S-I-6-4
