[S-IV-2] Dissociative Adsorption Mechanism of Product Gas in W-CVD Revealed by Molecular Orbital Calculation and Its Determinant Role in Filling Features

Yoshiaki TAKEMURA、Jiro USHIO、Takuya MARUIZUMI、Ryotaro IRIE、Nobuyoshi KOBAYASHI (1.Central Research Laboratory, Hitachi, Ltd.、2.Semiconductor Development Center, Semiconductor & Integrated Circuits Division, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1995.S-IV-2