[S-IV-2] Dissociative Adsorption Mechanism of Product Gas in W-CVD Revealed by Molecular Orbital Calculation and Its Determinant Role in Filling Features

Yoshiaki TAKEMURA, Jiro USHIO, Takuya MARUIZUMI, Ryotaro IRIE, Nobuyoshi KOBAYASHI (1.Central Research Laboratory, Hitachi, Ltd., 2.Semiconductor Development Center, Semiconductor & Integrated Circuits Division, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1995.S-IV-2