[S-VI-3] Preferential Nucleation of Nanocrystalline Silicon along Microsteps

Masanori Otobe、Jun Kawahara、Shunri Oda (1.Research Center for Quantum Effect Electronics, Tokyo Institute of Technology、2.PRESTO, JRDC)

https://doi.org/10.7567/SSDM.1995.S-VI-3