[A-4-2] The Role of Hydrogen during Rapid Vapor-Phase Doping Analyzed by FTIR-ATR

Yukihiro KIYOTA, Seiji SUZUKI, Taroh INADA (1.Central Research Laboratory, Hitachi Ltd., 2.College of Engineering, Hosei University)

https://doi.org/10.7567/SSDM.1996.A-4-2