[A-5-2] Anomalous Junction Leakage Behavior of Ti-SALICIDE Contacts on Ultra-Shallow Junctions

Atsuko SAKATA, Masato KOYAMA, Haruko AKUTSU, Iwao KUNISHIMA, Mitsuo KOIKE, Mitsuhiro TOMITA (1.Microelectronics Engineering Laboratory, ULSI Research Laboratories, Environmental Engineering Laboratory, TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.1996.A-5-2