[B-1-2] Effects of Cleavage on Local Cross-Sectional Stress Distribution in Trench Isolation Structure

Atsushi YAGISHITA、Tomohiro SAITO、Satoshi MATSUDA、Yukihiro USHIKU (1.Microelectronics Engineering Laboratories, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1996.B-1-2