[B-3-2] Evidence for Asymmetrical Hydrogen Profile in Thin D2O Oxidized SiO2 by SIMS and Modified TDS

Kouichi MURAOKA、Shin-ichi TAKAGI、Akira TORIUMI (1.ULSI Research Laboratories, TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.1996.B-3-2