The Japan Society of Applied Physics

[B-3-3] Effects of Electrode Materials and Annealing Ambients on the Leakage Current of TiO2 Films

S. C. Sun, T. F. Chen, T. H. Liang, F. M. Pan (1.National Nano Device Laboratory National Chiao Tung University)

https://doi.org/10.7567/SSDM.1996.B-3-3