[D-3-3] Insitu Fabrication of High Quality Oxide and Poly-Si Film by Excimer Laser Irradiation

Cheol-Min Park, Juhn-Suk Yoo, Byung-Hyuk Min, Dae-Kyu Moon, Min-Koo Han (1.Room 1102, School of Electrical Engineering, Seoul National University, 2.LG R&D Center)

https://doi.org/10.7567/SSDM.1996.D-3-3