[D-3-4] Low Temperature(≦550℃) CMOS Thin-Film Transistors in RTCVD Poly-Si0.88Ge0.12 Films

Seo-Kyu Lee、Seong-Min Choe、Chang-Geun Ahn、Wook-Jin Chung、Young-Kyu Kwon、B. K. Kang、Ohyun Kim (1.Department of Electronic and Electrical Engineering, Pohang University of Science and Technology、2.Research Institute of Industrial Science and Technology、3.LG Semiconductor Co., Ltd.)

https://doi.org/10.7567/SSDM.1996.D-3-4