[D-4-1] Silicon Micromachined Microphotonics

K. Y. Lau, O. Solgaard, N. Tien, M. Daneman, M. Kiang, R. S. Muller (1.Department of EECS, University of California at Berkeley)

https://doi.org/10.7567/SSDM.1996.D-4-1