[D-4-3] High-Rate GaAs Epitaxial Lift-Off Technique for Optoelectronic Integrated Circuits

J. Maeda、Y. Sasaki、K. Shibahara、S. Yokoyama、S. Miyazaki、M. Hirose (1.Research Center for Nanodevices and Systems, Hiroshima University、2.Faculty of Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1996.D-4-3