[D-4-3] High-Rate GaAs Epitaxial Lift-Off Technique for Optoelectronic Integrated Circuits

J. Maeda, Y. Sasaki, K. Shibahara, S. Yokoyama, S. Miyazaki, M. Hirose (1.Research Center for Nanodevices and Systems, Hiroshima University, 2.Faculty of Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1996.D-4-3