Polyimide Optical Waveguide with Multi-Fan-Out for Multi-Chip Module Application

Yutaka NOGUCHI; Takuji MATSUMOTO; Yoshiharu KUDOH; Mitsumasa KOYANAGI

doi:https://doi.org/10.7567/SSDM.1996.D-4-4

[D-4-4] Polyimide Optical Waveguide with Multi-Fan-Out for Multi-Chip Module Application

Yutaka NOGUCHI, Takuji MATSUMOTO, Yoshiharu KUDOH, Mitsumasa KOYANAGI (1.Dept. of Machine Intelligence and System Engineering, Intelligent System Design Laboratory, Tohoku University)

https://doi.org/10.7567/SSDM.1996.D-4-4

1996 International Conference on Solid State Devices and Materials

[D-4-4] Polyimide Optical Waveguide with Multi-Fan-Out for Multi-Chip Module Application