FN Program Technology of Sector Erasable Flash Memory with Conventional 2-Layer Poly Silicon ETOX Cell Structure

Naoyuki SHINMURA; Takuji TANIGAMI; Kenji HAKOZAKI; Yukiharu AKIYAMA; Shinichi SATO; Katsuji IGUCHI; Keizo SAKIYAMA

doi:https://doi.org/10.7567/SSDM.1996.D-7-1

[D-7-1] FN Program Technology of Sector Erasable Flash Memory with Conventional 2-Layer Poly Silicon ETOX Cell Structure

Naoyuki SHINMURA, Takuji TANIGAMI, Kenji HAKOZAKI, Yukiharu AKIYAMA, Shinichi SATO, Katsuji IGUCHI, Keizo SAKIYAMA (1.VLSI Development Laboratories, IC Tenri Group, SHARP Corporation)

https://doi.org/10.7567/SSDM.1996.D-7-1

1996 International Conference on Solid State Devices and Materials

[D-7-1] FN Program Technology of Sector Erasable Flash Memory with Conventional 2-Layer Poly Silicon ETOX Cell Structure