[D-7-3] A New Low-Resistance Antifuse with Planar Metal/Dielectric/Poly-Si/Dielectric/Metal Structure

Jong Tae Baek, Hyung Joun Yoo, Sung Hoon Chung, Sang Won Kang, Byung Tae Ahn (1.Semiconductor Technology Division, Electronics and Telecommunications Research Institute, 2.Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)

https://doi.org/10.7567/SSDM.1996.D-7-3