[PC-1-2] Suppression of Current-Induced Degradation in Laser-Crystallized Polycrystalline Silicon Films by Adding Oxygen

Hong-Seok CHOI, Jae-Hong JUN, Min-Koo HAN (1.School of Electrical Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.1996.PC-1-2