[PC-2-4] An Investigation on Stress Effect in Poly-Si Thin Film Transistors Fabricated by Metal Induced Lateral Crystallization

Tae-Hyung Ihn、Byung-Il Lee、Seok-Woon Lee、Yoo-Chan Jeon、Seung-Ki Joo (1.Div. Mater. and Sci. Eng., Seoul Nat'l Univ.、2.Samsung Electron Co.、3.LG semicon Co. Ltd.)

https://doi.org/10.7567/SSDM.1996.PC-2-4