[PC-2-4] An Investigation on Stress Effect in Poly-Si Thin Film Transistors Fabricated by Metal Induced Lateral Crystallization

Tae-Hyung Ihn, Byung-Il Lee, Seok-Woon Lee, Yoo-Chan Jeon, Seung-Ki Joo (1.Div. Mater. and Sci. Eng., Seoul Nat'l Univ., 2.Samsung Electron Co., 3.LG semicon Co. Ltd.)

https://doi.org/10.7567/SSDM.1996.PC-2-4