[PC-3-5] 0.8μm CMOS Process Compatible 60V - 100mΩ・mm2 Power MOSFET on Bonded SOI

Yusuke KAWAGUCHI, Yoshihiro YAMAGUCHI, Hideyuki FUNAKI, Yoshinori TERAZAKI, Akio NAKAGAWA (1.Materials and Devices Research Laboratories, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1996.PC-3-5