[PC-3-7] Improving Transient Response of Si Metal-Semiconductor-Metal Photodetector with an Additional i-a-SiGe Film

Li-Hong Laih, Jyh-Cheng Wang, Yen-Ann Chen, Wen-Chin Tsay, Tean-Sen Jen, Jyh-Shin Chen, Jyh-Wong Hong (1.Department of Electrical Engineering, National Central University, 2.Precision Instrument Development Center, ITRI)

https://doi.org/10.7567/SSDM.1996.PC-3-7