[PC-3-7] Improving Transient Response of Si Metal-Semiconductor-Metal Photodetector with an Additional i-a-SiGe Film

Li-Hong Laih、Jyh-Cheng Wang、Yen-Ann Chen、Wen-Chin Tsay、Tean-Sen Jen、Jyh-Shin Chen、Jyh-Wong Hong (1.Department of Electrical Engineering, National Central University、2.Precision Instrument Development Center, ITRI)

https://doi.org/10.7567/SSDM.1996.PC-3-7