Deposition of Polyimide Films by Ionized Cluster Beam

K. W. KIM; N. Y. KIM; C. E. HONG; S. Y. KIM; C. N. WHANG

doi:https://doi.org/10.7567/SSDM.1996.PC-6-4

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜 1996年8月29日
Pacifico Yokohama, Yokohama, Japan

[PC-6-4] Deposition of Polyimide Films by Ionized Cluster Beam

K. W. KIM、N. Y. KIM、C. E. HONG、S. Y. KIM、C. N. WHANG (1.Dept. of physics, Yonsei University、2.Dept. of physics, Sunmoon University、3.Dept. of Physics, Soongsil University)

https://doi.org/10.7567/SSDM.1996.PC-6-4

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