[PC-6-4] Deposition of Polyimide Films by Ionized Cluster Beam

K. W. KIM, N. Y. KIM, C. E. HONG, S. Y. KIM, C. N. WHANG (1.Dept. of physics, Yonsei University, 2.Dept. of physics, Sunmoon University, 3.Dept. of Physics, Soongsil University)

https://doi.org/10.7567/SSDM.1996.PC-6-4