[PC-7-6] AFM Direct Measurement of Sidewall Roughness in GaAs/AlGaAs Waveguides

K. Hosomi、M. Shirai、K. Hiruma、J. Shigeta、T. Katsuyama (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1996.PC-7-6