The Japan Society of Applied Physics

[PC-8-5] Orientation Control of Sr0.7Bi2.3Ta2O9 Thin Films by Chemical Process

Ichiro Koiwa, Takao Kanehara, Juro Mita, Toshiyuki Iwabuchi, Tetsuya Osaka, Sachiko Ono (1.Microsystem Technology Laboratory, Oki Electric Industry Co., Ltd., 2.Faculty of Science and Engineering, Waseda University)

https://doi.org/10.7567/SSDM.1996.PC-8-5