[PD-1-2] Controlled Nitrogen Incorporation at Si-SiO2 Interfaces by Remote Plasma-Assisted Processing

Kwangok KOH、Hiro NIIMI、Gerald LUCOVSKY (1.North Carolina State University, Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering)

https://doi.org/10.7567/SSDM.1996.PD-1-2